Shaft length (LTotal)
7 mm
Number of shafts (NShaft)
1
Shaft width (WShaft)
95 µm
Number of electrodes (NEl)
16
Electrode Pitch (PEl)
66 µm x-direction
100 / 2600 µm y-direction
Electrode Length (LEl)
3300 µm
Electrode size (DEl), material (EM), probe thickness (T)
15 µm, IrOx, 50 µm
Size of the optional, internal reference electrode
42 × 100 µm2
