Shaft length (LTotal)
70 mm
Number of shafts (NShaft)
1
Shaft width (WShaft)
141 µm
Number of electrodes (NEl)
32
Electrode Pitch (PEl)
50 µm x-direction
Electrode Length (LEl)
2750 µm
Electrode size (DEl), material (EM), probe thickness (T)
25 µm, IrOx, 50 µm
Size of the optional, internal reference electrode
42 × 100 µm2
