Shaft length (LTotal)
10 mm
Number of shafts (NShaft)
8
Shaft pitch (PShaft)
200 µm
Shaft width (WShaft)
61.5 µm
Number of electrodes (NEl)
64 (8 x 8), B-Style
Electrode Pitch (PEl)
20 µm x-direction
Electrode Length (LEl)
140 µm
Electrode size (DEl), material (EM), probe thickness (T)
15 µm, IrOx, 50 µm
Size of the optional, internal reference electrode
42 x 100 µm2
