Shaft length (LTotal)
10 mm
Number of shafts (NShaft)
1
Shaft pitch (PShaft)
0 µm
Shaft width (WShaft)
111 µm
Number of electrodes (NEl)
16
Electrode Pitch (PEl)
50 µm
Electrode Length (LEl)
775 µm
Electrode size (DEl), material (EM), probe thickness (T)
25, IrOx, 10 µm
Size of the optional, internal reference electrode
3491 µm2